YAMATO
Dong-il Science Co.
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PiPi
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Specifications
Item Code | 00 |
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Model | PiPi |
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Model | PiPi |
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Plasma mode | RIE (reactive ion etching) |
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Electrode structure | Parallel flat panel type |
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Electrode dimensions | W130¡¿D130mm |
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Internal dmensions | W230¡¿D130¡¿H100mm |
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External dimensions | W438¡¿D520¡¿H565mm |
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Power source (50/60Hz) | AC115V/AC220V Single phase with step-down transformer |
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Vacuum meter | Bourdon gauge |
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Controller | Sequencer |
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Operation/display unit | 4.5-inch monochrome STN touch panel |
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High-frequency out-put power | 50-200W |
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Reference oscillator | Quarts oscillator |
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Oscillation frequency | 13.56MHz |
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Output setting | Manual setting knob |
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Matching method | Auto tuning |
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Purge gas | N2 1/4-inch bite type tube fitting |
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Reaction gas | Ar mass flow meter 1/4-inch bite type tube fitting |
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Internal dimensions£¨W¡¿D¡¿H mm£© | 230¡¿130¡¿100mm |
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External dimensions£¨W¡¿D¡¿H mm£© | 438¡¿520¡¿565mm |
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Power Source | 115V /220V Single phase with step-down transformer |
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Weight | 50kg |
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