Item Code | 215015 |
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Model | PM100 |
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Plasma source | Low frequency high voltage power supply |
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Gas flow meter | For Oxygen: Flow volume 30¢¦300mL/min |
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External Dimensions | 310W ¡¿ 300D ¡¿ 448H mm (without projection) |
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Vacuum Pump Connection Port | Vacuum hose ¥õ15mmOD with joint (30L/min exhaust volume vacuum pump is recommended) |
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Gas Connection Port | ¥õ6.35mmOD with piping joint |
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Piping Material | SUS, Teflon |
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Internal dimensions£¨¥õ¡¿D mm£© | ¥õ100¡¿160mm |
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External dimensions£¨W¡¿D¡¿H mm£© | 310¡¿300¡¿448mm |
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Power Source | AC115VV /AC220V Single phase with step-down transformer |
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Weight | 16kg |
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